Cutting Machine Lineup

• Features/Dimensions
• Suitable Materials
• Structural Advantages
• Standard Specifications

Equipped with 2 spindles.
Multi-gang blades of different dimensions allow rectangular dicing

Features

Suitable Materials

■ Maximum workpiece size: 250 mm x 250 mm

Shape

Suitable
products

・Ceramic capacitors
・Optical glass

Type

Structural Advantages

Standard Specifications

2-spindle Slicing Machines

DLS-3225

Chuck table		(mm)	400 x 400
X axis	Effective cutting stroke Minimum indexing setting unit Feed speed range Axis drive system Drive source Axis control system	(mm) (mm) (mm/sec)	400 0.001 0 - 150 Rotates precision ball screw with motor shaft to drive AC servo motor Semi-closed loop control by the servo controller
Y axis	Effective cutting stroke Minimum indexing setting unit Feed speed range Axis drive system Drive source Axis control system	(mm) (mm) (mm/sec)	400 0.001 0 - 50 Rotates precision ball screw with motor shaft to drive AC servo motor Full-closed loop control by linear scale feed back
Z axis	Effective stroke Minimum indexing setting unit Feed speed range Axis drive system Drive source Axis control system	(mm) (mm) (mm/sec)	40 0.001 0 - 50 Rotates the precision ball screw through the reduction gear from the motor shaft to drive AC servo motor Semi-closed loop control by the servo controller
θ axis	Rotation range Minimum resolution Drive source	(°)	110 360°/4096000 pulses Direct drive motor
Workpiece chuck table	Chuck table design Workpiece sizes (substrate sizes) handled Vacuum source	(mm)	Hole type chuck table that uses vacuum to chuck substrate 350 x 350 Ejector-type vacuum generator
Spindle	Type Speed range Speed control Motor Blade size	(rpm) (kw) (kw) (mm)	Belt drive type ceramic ball bearing spindle 3,000 - 8,000 5.5 Spindle inverter 3.7 Low vibration motor OD φ70 x ID φ40
Alignment microscope	Microscope specifications Microscope magnification LCD monitor Overall magnification on monitor View size on the monitor	(mm)	Oblique lighting microscope 2x 15" touch panel Approx. 127x 1.87 x 1.75
Operation	Operation panel Functions other than those on the panel		Start, Select and Change-over switches for mechanical parts, as well as Status Function Data Input and image display Control power ON/OFF switch, safety release, manual pulsar handle
Display			3-color light display
Electrical components	X, Y and Z axes θ axis Entire unit		Controlled using a servo controller DD motor PC control
Transfer section	Cassette system Drive source Reversible motor		Rotation type belt cassette Number stored in cassette 9 plates on the loader side, and 9 plates on the unloader side
Accuracy	X axis straightness In the vertical plane Table top accuracy Y axis index accuracy Indexing Z axis repeatability Rotation accuracy of blade axis ・Radial direction runout ・Thrust direction runout	(mm) (mm) (mm) (mm) (mm) (mm) (mm) (mm)	In the horizontal plane 0.01/500 0.01/500 0.02 (350 x 350) Repeatability 0.005 0.01/250 0.005 0.002 or less 0.002 or less
Utility	Power: Power supply Power: Power consumption Power: Power supply noise Power: Grounding Air source: Air source pressure Air source: Consumption Air source: Dew point Air source: Residual oil content Air source: Connector Coolant water: Supply pressure Coolant water: Flow rate Coolant water: Connector	(kVA) (MPa・G) (l/min) (PPM Wt/Wt) (MPa・G) (l/min)	Three-phase AC 200 V within ±10% 50/60 Hz 12kVA 2000 V or less at pulse width 500 ns (square wave) JIS third class grounding resistance 100 Ω or less 0.5 – 0.55 (approx. 5.0 – 5.5 kgf/cm2/G) 300 (A.N.R)) (including 2 vacuum chucks ) -15℃ or less 0.1 Rc (PT) 3/8" female screws/or urethane tube fittings of OD 10 0.15 – 0.3 (approx. 1.5 – 3 kgf/cm2/G) 30 (MAX) Rc (PT) 3/8" female screws (both supply and emission)/or fittings for 15 x 22 blade hose
Machine size	Main unit (including conveyance) Electrical box	(mm) (mm)	(W) 2650 x (D) 1970 x (H) 1970 (W) 900 x (D) 450 x (H) 1170
Machine weight	Main unit Transfer section Electrical box	(kg) (kg) (kg)	2800 240 300

*The specification of this machine may be changed for improvement without notice.
*Please contact our sales department for cutting application inquiries on this machine.

Consult us first

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